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Tung-Wei Lin
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Year
Characterization and control of residual stress and curvature in anodically bonded devices and substrates with etched features
RA Inzinga, TW Lin, M Yadav, HT Johnson, GP Horn
Experimental mechanics 52, 637-648, 2012
192012
Polarization-resolved imaging for both photoelastic and photoluminescence characterization of photovoltaic silicon wafers
TW Lin, LP Rowe, AJ Kaczkowski, GP Horn, HT Johnson
Experimental Mechanics 56, 1339-1350, 2016
72016
Residual stresses at cavity corners in silicon-on-insulator bonded wafers
TW Lin, O Elkhatib, J Makinen, M Palokangas, HT Johnson, GP Horn
Journal of Micromechanics and Microengineering 23 (9), 095004, 2013
72013
Quantitative infrared photoelasticity of silicon photovoltaic wafers using a discrete dislocation model
TW Lin, GP Horn, HT Johnson
Journal of Applied Mechanics 82 (1), 011001, 2015
62015
Polarized light emission from grain boundaries in photovoltaic silicon
TW Lin, LP Rowe, AJ Kaczkowski, GP Horn, HT Johnson
Extreme Mechanics Letters 9, 397-404, 2016
42016
Anisothermal anodic bonding: A method to control global curvature and residual stress
M Yadav, TW Lin, HT Johnson, GP Horn
ECS Transactions 33 (4), 563, 2010
32010
A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors
TW Lin, MTK Hou, RS Chen
Key Engineering Materials 326, 1379-1382, 2006
32006
Characterization of silicon photovoltaic wafers using polarized infrared imaging
TW Lin
University of Illinois at Urbana-Champaign, 2015
22015
Process induced stresses in cavity SOI wafers
O Elkhatib, J Makinen, M Palokangas, TW Lin, HT Johnson, GP Horn
ECS Transactions 33 (4), 543, 2010
22010
Development of nonuniform residual stresses during anodic bonding
GP Horn, R Gerbach, TW Lin, M Bernach, S Brand, HT Johnson
ECS Transactions 33 (4), 553, 2010
22010
Characterization of silicon photovoltaic wafers using infrared photoelasticity
TW Lin, GP Horn, HT Johnson
Residual Stress, Thermomechanics & Infrared Imaging, Hybrid Techniques and …, 2014
12014
Control and quantification of residual stresses in anodically bonded MEMS structures
R Inzinga, T Lin, M Yadav, HT Johnson, GP Horn
MEMS and Nanotechnology, Volume 2: Proceedings of the 2010 Annual Conference …, 2011
12011
Nondestructive Photoelastic and Machine Learning Characterization of Surface Cracks and Prediction of Weibull Parameters for Photovoltaic Silicon Wafers
LP Rowe, AJ Kaczkowski, TW Lin, GP Horn, HT Johnson
Journal of Engineering Materials and Technology 144 (3), 031001, 2022
2022
residual stress state of cavity-SOI wafers, which can be verified in the R&D phase with tools such as an infrared polariscope.
O Elkhatib, J Makinen, M Palokangas, TW Lin, HT Johnson, GP Horn
Abstract# 1752, 218th ECS Meeting,© 2010 The Electrochemical Society
O Elkhatib, J Makinen, M Palokangas, TW Lin, HT Johnson, GP Horn
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Articles 1–15