Transparent flexible thermoelectric material based on non-toxic earth-abundant p-type copper iodide thin film C Yang, D Souchay, M Kneiß, M Bogner, HM Wei, M Lorenz, O Oeckler, ...
Nature communications 8 (1), 16076, 2017
328 2017 C-AFM-based thickness determination of thin and ultra-thin SiO2 films by use of different conductive-coated probe tips W Frammelsberger, G Benstetter, J Kiely, R Stamp
Applied Surface Science 253 (7), 3615-3626, 2007
133 2007 Nanostructured fuzz growth on tungsten under low-energy and high-flux He irradiation Q Yang, YW You, L Liu, H Fan, W Ni, D Liu, CS Liu, G Benstetter, Y Wang
Scientific reports 5 (1), 10959, 2015
88 2015 Hybrid 2D–CMOS microchips for memristive applications K Zhu, S Pazos, F Aguirre, Y Shen, Y Yuan, W Zheng, O Alharbi, ...
Nature 618 (7963), 57-62, 2023
78 2023 Thickness determination of thin and ultra-thin SiO2 films by C-AFM IV-spectroscopy W Frammelsberger, G Benstetter, J Kiely, R Stamp
Applied Surface Science 252 (6), 2375-2388, 2006
73 2006 High-flux He+ irradiation effects on surface damages of tungsten under ITER relevant conditions L Liu, D Liu, Y Hong, H Fan, W Ni, Q Yang, Z Bi, G Benstetter, S Li
Journal of Nuclear Materials 471, 1-7, 2016
66 2016 A review of advanced scanning probe microscope analysis of functional films and semiconductor devices G Benstetter, R Biberger, D Liu
Thin Solid Films 517 (17), 5100-5105, 2009
62 2009 Degradation of polycrystalline HfO2-based gate dielectrics under nanoscale electrical stress V Iglesias, M Lanza, K Zhang, A Bayerl, M Porti, M Nafría, X Aymerich, ...
Applied physics letters 99 (10), 2011
51 2011 SPM investigation of diamond-like carbon and carbon nitride films D Liu, G Benstetter, E Lodermeier, I Akula, I Dudarchyk, Y Liu, T Ma
Surface and Coatings Technology 172 (2-3), 194-203, 2003
50 2003 The effect of the surface layer of tetrahedral amorphous carbon films on their tribological and electron emission properties investigated by atomic force microscopy D Liu, G Benstetter, W Frammelsberger
Applied physics letters 82 (22), 3898-3900, 2003
41 2003 Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films M Bogner, A Hofer, G Benstetter, H Gruber, RYQ Fu
Thin Solid Films 591, 267-270, 2015
39 2015 Conductivity and Charge Trapping After Electrical Stress in Amorphous and Polycrystalline M Lanza, M Porti, M Nafria, X Aymerich, G Benstetter, E Lodermeier, ...
IEEE transactions on nanotechnology 10 (2), 344-351, 2010
38 2010 Influence of the manufacturing process on the electrical properties of thin (< 4 nm) Hafnium based high-k stacks observed with CAFM M Lanza, M Porti, M Nafria, G Benstetter, W Frammelsberger, ...
Microelectronics Reliability 47 (9-11), 1424-1428, 2007
37 2007 The evolution of He nanobubbles in tungsten under fusion-relevant He ion irradiation conditions Z Bi, D Liu, Y Zhang, L Liu, Y Xia, Y Hong, H Fan, G Benstetter, G Lei, ...
Nuclear Fusion 59 (8), 086025, 2019
31 2019 Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al2O3 based devices M Lanza, M Porti, M Nafria, X Aymerich, G Benstetter, E Lodermeier, ...
Microelectronic engineering 86 (7-9), 1921-1924, 2009
31 2009 Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films D Liu, G Benstetter, E Lodermeier, J Vancea
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (5 …, 2003
31 2003 Surface roughness, mechanical and tribological properties of ultrathin tetrahedral amorphous carbon coatings from atomic force measurements D Liu, G Benstetter, E Lodermeier
Thin Solid Films 436 (2), 244-249, 2003
30 2003 RETRACTED: Cross-and in-plane thermal conductivity of AlN thin films measured using differential 3-omega method M Bogner, G Benstetter, YQ Fu
Surface and Coatings Technology 320, 91-96, 2017
28 2017 Observation of interstitial loops in He+ irradiated W by conductive atomic force microscopy Q Yang, H Fan, W Ni, L Liu, T Berthold, G Benstetter, D Liu, Y Wang
Acta Materialia 92, 178-188, 2015
27 2015 Combined AFM–SEM study of the diamond nucleation layer on Ir (001) S Gsell, M Schreck, G Benstetter, E Lodermeier, B Stritzker
Diamond and related materials 16 (4-7), 665-670, 2007
26 2007 