| Spatial atomic layer deposition of zinc oxide thin films A Illiberi, F Roozeboom, P Poodt ACS applied materials & interfaces 4 (1), 268-272, 2012 | 126 | 2012 |
| Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices RLZ Hoye, D Muñoz-Rojas, SF Nelson, A Illiberi, P Poodt, F Roozeboom, ... APL materials 3 (4), 2015 | 98 | 2015 |
| Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics P Poodt, R Knaapen, A Illiberi, F Roozeboom, A van Asten Journal of Vacuum Science & Technology A 30 (1), 2012 | 96 | 2012 |
| Spatial Atmospheric Atomic Layer Deposition of AlxZn1–xO A Illiberi, R Scherpenborg, Y Wu, F Roozeboom, P Poodt ACS applied materials & interfaces 5 (24), 13124-13128, 2013 | 66 | 2013 |
| On the kinetics of spatial atomic layer deposition P Poodt, J van Lieshout, A Illiberi, R Knaapen, F Roozeboom, A van Asten Journal of Vacuum Science & Technology A 31 (1), 2013 | 66 | 2013 |
| Atmospheric pressure plasma enhanced spatial ALD of silver FJ van den Bruele, M Smets, A Illiberi, Y Creyghton, P Buskens, ... Journal of Vacuum Science & Technology A 33 (1), 2015 | 61 | 2015 |
| Spatial Atmospheric Atomic Layer Deposition of InxGayZnzO for Thin Film Transistors A Illiberi, B Cobb, A Sharma, T Grehl, H Brongersma, F Roozeboom, ... ACS applied materials & interfaces 7 (6), 3671-3675, 2015 | 60 | 2015 |
| Selective passivation and selective deposition EE Tois, SP Haukka, RH Matero, E Färm, D Longrie, H Suemori, JW Maes, ... US Patent 11,094,535, 2021 | 57 | 2021 |
| Effect of ion bombardment on the a-Si: H based surface passivation of c-Si surfaces A Illiberi, P Kudlacek, AHM Smets, M Creatore, MCM Van De Sanden Applied Physics Letters 98 (24), 2011 | 56 | 2011 |
| Physical and chemical degradation behavior of sputtered aluminum doped zinc oxide layers for Cu (In, Ga) Se2 solar cells M Theelen, T Boumans, F Stegeman, F Colberts, A Illiberi, J Van Berkum, ... Thin Solid Films 550, 530-540, 2014 | 55 | 2014 |
| Growth of ZnOx: Al by high-throughput CVD at atmospheric pressure A Illiberi, P Simons, B Kniknie, J Van Deelen, M Theelen, M Zeman, ... Journal of Crystal Growth 347 (1), 56-61, 2012 | 41 | 2012 |
| Atmospheric spatial atomic layer deposition of In-doped ZnO A Illiberi, R Scherpenborg, F Roozeboom, P Poodt ECS Journal of Solid State Science and Technology 3 (5), P111, 2014 | 40 | 2014 |
| Industrial high-rate (∼ 14 nm/s) deposition of low resistive and transparent ZnOx: Al films on glass A Illiberi, B Kniknie, J Van Deelen, H Steijvers, D Habets, P Simons, ... Solar Energy Materials and Solar Cells 95 (7), 1955-1959, 2011 | 37 | 2011 |
| On the environmental stability of ZnO thin films by spatial atomic layer deposition A Illiberi, R Scherpenborg, M Theelen, P Poodt, F Roozeboom Journal of Vacuum Science & Technology A 31 (6), 2013 | 36 | 2013 |
| Recent Advances in Atmospheric Vapor‐Phase Deposition of Transparent and Conductive Zinc Oxide A Illiberi, P Poodt, PJ Bolt, F Roozeboom Chemical Vapor Deposition 20 (7-8-9), 234-242, 2014 | 34 | 2014 |
| Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors A Illiberi, I Katsouras, S Gazibegovic, B Cobb, E Nekovic, W van Boekel, ... Journal of Vacuum Science & Technology A 36 (4), 2018 | 31 | 2018 |
| Novel approach to thin film polycrystalline silicon on glass A Illiberi, K Sharma, M Creatore, MCM Van De Sanden Materials Letters 63 (21), 1817-1819, 2009 | 31 | 2009 |
| Atmospheric spatial atomic layer deposition of Zn (O, S) buffer layer for Cu (In, Ga) Se2 solar cells CH Frijters, P Poodt, A Illiberi Solar Energy Materials and Solar Cells 155, 356-361, 2016 | 29 | 2016 |
| Selective passivation and selective deposition JWH Maes, ME Givens, SP Haukka, V Paruchuri, IJ Raaijmakers, S Deng, ... US Patent 11,145,506, 2021 | 28 | 2021 |
| Atmospheric pressure plasma enhanced spatial ALD of ZrO2 for low-temperature, large-area applications MA Mione, I Katsouras, Y Creyghton, W Van Boekel, J Maas, G Gelinck, ... ECS Journal of Solid State Science and Technology 6 (12), N243, 2017 | 25 | 2017 |
