A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure SE Alper, K Azgin, T Akin Sensors and Actuators A: Physical 135 (1), 34-42, 2007 | 138 | 2007 |
High-performance SOI-MEMS gyroscope with decoupled oscillation modes SE Alper, K Azgin, T Akin 19th IEEE International Conference on Micro Electro Mechanical Systems, 70-73, 2006 | 42 | 2006 |
Temperature compensation of a capacitive MEMS accelerometer by using a MEMS oscillator T Kose, K Azgin, T Akin 2016 IEEE International Symposium on Inertial Sensors and Systems, 33-36, 2016 | 35 | 2016 |
Design and fabrication of a high performance resonant MEMS temperature sensor T Kose, K Azgin, T Akin Journal of Micromechanics and Microengineering 26 (4), 045012, 2016 | 33 | 2016 |
MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design A Torrents, K Azgin, SW Godfrey, ES Topalli, T Akin, L Valdevit Journal of Micromechanics and Microengineering 20 (12), 125004, 2010 | 33 | 2010 |
An SOI-MEMS tuning fork gyroscope with linearly coupled drive mechanism K Azgin, Y Temiz, T Akin 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems …, 2007 | 31 | 2007 |
A capacitive MEMS accelerometer readout with concurrent detection and feedback using discrete components Y Terzioglu, SE Alper, K Azgin, T Akin 2014 IEEE/ION Position, Location and Navigation Symposium-PLANS 2014, 12-15, 2014 | 26 | 2014 |
Ultrahigh-dynamic-range resonant MEMS load cells for micromechanical test frames K Azgin, T Akin, L Valdevit Journal of microelectromechanical systems 21 (6), 1519-1529, 2012 | 24 | 2012 |
A single-mass self-resonating closed-loop capacitive MEMS accelerometer T Kose, Y Terzioglu, K Azgin, T Akin 2016 IEEE sensors, 1-3, 2016 | 18 | 2016 |
The effects of tine coupling and geometrical imperfections on the response of DETF resonators K Azgin, L Valdevit Journal of micromechanics and microengineering 23 (12), 125011, 2013 | 17 | 2013 |
CBFEM-MPI: A parallelized version of characteristic basis finite element method for extraction of 3-D interconnect capacitances O Ozgun, R Mittra, M Kuzuoglu IEEE transactions on advanced packaging 32 (1), 164-174, 2009 | 17 | 2009 |
A simple out-of-plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing Y Terzioglu, T Kose, K Azgin, T Akin 2015 IEEE SENSORS, 1-3, 2015 | 16 | 2015 |
Simultaneous detection of linear and coriolis accelerations on a mode-matched MEMS gyroscope S Sonmezoglu, HD Gavcar, K Azgin, SE Alper, T Akin 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 15 | 2014 |
A turbine-based MEMS sensor for spirometry with wearable devices MI Beyaz, S Habibiabad, H Yıldız, U Göreke, K Azgın IEEE Sensors Journal 19 (19), 8612-8617, 2019 | 11 | 2019 |
The development and performance characterization of turbine prototypes for a MEMS spirometer U Göreke, S Habibiabad, K Azgın, YS Doğrusöz, MI Beyaz IEEE Sensors Journal 16 (3), 628-633, 2015 | 11 | 2015 |
Self calibrating micro-fabricated load cells L Valdevit, K Azgin US Patent 9,228,916, 2016 | 10 | 2016 |
A single mass two-axis capacitive MEMS accelerometer with force rebalance T Köse, Y Terzioğlu, K Azgın, T Akın 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS …, 2015 | 10 | 2015 |
A resonant tuning fork force sensor with unprecedented combination of resolution and range K Azgin, C Ro, A Torrents, T Akin, L Valdevit 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 10 | 2011 |
A Lorentz force MEMS magnetometer S Pala, M Çiçek, K Azgın 2016 IEEE SENSORS, 1-3, 2016 | 9 | 2016 |
A Dual-Resonator Temperature Sensing Approach With Time Base Error Suppression O Kaya, T Köse, K Azgın IEEE Sensors Journal 20 (2), 707-714, 2019 | 8 | 2019 |