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Rudy Pang
Rudy Pang
National University of Singapore, Center for Ion beam application
Verified email at nus.edu.sg
Title
Cited by
Cited by
Year
Brightness measurement of an electron impact gas ion source for proton beam writing applications
N Liu, X Xu, R Pang, P Santhana Raman, A Khursheed, JA Van Kan
Review of Scientific Instruments 87 (2), 2016
112016
Design considerations for a compact proton beam writing system aiming for fast sub-10 nm direct write lithography
X Xu, N Liu, PS Raman, S Qureshi, R Pang, A Khursheed, JA van Kan
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2017
82017
Fabrication and development of high brightness nano-aperture ion source
X Xu, R Pang, PS Raman, R Mariappan, A Khursheed, JA van Kan
Microelectronic Engineering 174, 20-23, 2017
82017
Considerations for the nano aperture ion source: Geometrical design and electrical control
JA Van Kan, R Pang, T Basu, Y Dou, G Gokul, N Tarino, J Tregidga, ...
Review of Scientific Instruments 91 (1), 2020
42020
Performance test of high brightness nano-aperture ion source
X Xu, PS Raman, R Pang, N Liu, A Khursheed, JA van Kan
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2017
42017
Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system
JA Van Kan, XU Xinxin, SR Pattabiraman, R Pang
US Patent 11,056,315, 2021
2021
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