Brightness measurement of an electron impact gas ion source for proton beam writing applications N Liu, X Xu, R Pang, P Santhana Raman, A Khursheed, JA Van Kan Review of Scientific Instruments 87 (2), 2016 | 11 | 2016 |
Design considerations for a compact proton beam writing system aiming for fast sub-10 nm direct write lithography X Xu, N Liu, PS Raman, S Qureshi, R Pang, A Khursheed, JA van Kan Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2017 | 8 | 2017 |
Fabrication and development of high brightness nano-aperture ion source X Xu, R Pang, PS Raman, R Mariappan, A Khursheed, JA van Kan Microelectronic Engineering 174, 20-23, 2017 | 8 | 2017 |
Considerations for the nano aperture ion source: Geometrical design and electrical control JA Van Kan, R Pang, T Basu, Y Dou, G Gokul, N Tarino, J Tregidga, ... Review of Scientific Instruments 91 (1), 2020 | 4 | 2020 |
Performance test of high brightness nano-aperture ion source X Xu, PS Raman, R Pang, N Liu, A Khursheed, JA van Kan Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2017 | 4 | 2017 |
Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system JA Van Kan, XU Xinxin, SR Pattabiraman, R Pang US Patent 11,056,315, 2021 | | 2021 |